JPH01133738U - - Google Patents
Info
- Publication number
- JPH01133738U JPH01133738U JP2965288U JP2965288U JPH01133738U JP H01133738 U JPH01133738 U JP H01133738U JP 2965288 U JP2965288 U JP 2965288U JP 2965288 U JP2965288 U JP 2965288U JP H01133738 U JPH01133738 U JP H01133738U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- centering cup
- wafers
- rotation device
- pins
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Jigs For Machine Tools (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2965288U JPH0715136Y2 (ja) | 1988-03-05 | 1988-03-05 | ウエハ回転装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2965288U JPH0715136Y2 (ja) | 1988-03-05 | 1988-03-05 | ウエハ回転装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01133738U true JPH01133738U (en]) | 1989-09-12 |
| JPH0715136Y2 JPH0715136Y2 (ja) | 1995-04-10 |
Family
ID=31254046
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2965288U Expired - Lifetime JPH0715136Y2 (ja) | 1988-03-05 | 1988-03-05 | ウエハ回転装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0715136Y2 (en]) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003168717A (ja) * | 2001-12-03 | 2003-06-13 | Yaskawa Electric Corp | ウェハ搬送フォーク |
| JP2008187172A (ja) * | 2007-01-29 | 2008-08-14 | Suss Microtec Test Systems Gmbh | 電子部品の試験方法とその方法を実施するための試験装置 |
| JP2011083829A (ja) * | 2009-10-13 | 2011-04-28 | Toyo Advanced Technologies Co Ltd | ワークの芯出し装置 |
| JP2021135257A (ja) * | 2020-02-28 | 2021-09-13 | 株式会社ミツトヨ | ワーク設置治具 |
-
1988
- 1988-03-05 JP JP2965288U patent/JPH0715136Y2/ja not_active Expired - Lifetime
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003168717A (ja) * | 2001-12-03 | 2003-06-13 | Yaskawa Electric Corp | ウェハ搬送フォーク |
| JP2008187172A (ja) * | 2007-01-29 | 2008-08-14 | Suss Microtec Test Systems Gmbh | 電子部品の試験方法とその方法を実施するための試験装置 |
| JP2011083829A (ja) * | 2009-10-13 | 2011-04-28 | Toyo Advanced Technologies Co Ltd | ワークの芯出し装置 |
| JP2021135257A (ja) * | 2020-02-28 | 2021-09-13 | 株式会社ミツトヨ | ワーク設置治具 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0715136Y2 (ja) | 1995-04-10 |